TCN™ Nitrogen Generator
Massive-scale, ultra-pure nitrogen production (up to 65,000 Nm³/h) designed for Carrier Gas Yards in the electronics industry. Available in BE and AO series.
Semiconductor fabs require massive, continuous supplies of ultra-pure nitrogen. Our TCN™ (Teisan Compact Nitrogen) generators provide safe, efficient, and reliable on-site gas production.
The backbone of carrier gas yards
Since its creation in the 1970s for the oil and gas industry, TCN™ (Teisan Compact Nitrogen) technology has continuously evolved to meet the stringent and rapidly evolving demands of the semiconductor industry. Today, our TCN™ series offers flexible options for scale, configuration, and purity (from parts per million to parts per billion), ensuring energy efficiency and competitive capital investment tailored to customer needs.
Combined with backup solutions and cryogenic storage, we guarantee long-term reliability and flexibility.
TCN™-BE (Best Energy): Produces 4,000 to 51,000 Nm³/h of gaseous nitrogen at ppb-level purity and pressures up to 9.5 barG. We now offer modular "Advanced" models (BE17K Adv. and BE34K Adv.) for fully standardized, faster project delivery.
TCN™-AO (Argon Oxygen): Designed for the most massive consumers, producing 40,000 to 65,000 Nm³/h of nitrogen while simultaneously co-producing high-purity oxygen and argon in both liquid and gaseous states. Just like our "Advanced" models, the high-capacity 65,000 Nm³/h product features a fully standardized and modularized design to guarantee rapid project delivery and deployment.
Unmatched purity and efficiency
Utilizing advanced cryogenic distillation, TCN™ plants separate air into its fundamental molecules with extreme precision.
The "Best Energy" (BE) configuration features a streamlined "Single column, Single Machine" process that minimizes specific energy consumption and allows higher reliability. When integrated with our downstream purification systems, the gas delivered to your fab contains less than 1 part per billion (ppb) of impurities, guaranteeing the absolute stability of your cleanrooms.
Frequently Asked Questions (FAQ)
What is a TCN™ unit?
TCN stands for “Teisan Compact Nitrogen” generator, a large-scale cryogenic air separation plant optimized by Air Liquide specifically for the ultra-pure gas and higher reliability requirements of the electronics industry.
What are the new TCN™ "Advanced" models?
The BE17K Adv. and BE34K Adv. are fully standardized, modular versions of our deeply proven BE generators, designed to reduce engineering time and accelerate time-to-market for new fabs.
Can a TCN™ plant produce gases other than nitrogen?
Yes. The TCN™-AO (Argon Oxygen) series is specifically designed to co-produce oxygen and argon alongside nitrogen. Additionally, the TCN™-BE series offers an option to co-produce Ultra Pure Oxygen (UPO), maximizing the utility of a single on-site facility.
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Powering global electronics
Air Liquide Engineering & Technologies is the trusted partner for the world's leading semiconductor manufacturers. Our recent investments include deploying massive, state-of-the-art TCN™ facilities and carrier gas yards for global tech leaders across China, Taiwan, Singapore, USA, Japan, South Korea and Germany.
Documentation
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Electronics Carrier Gas YardDownload the document PDF (2.05 MB)
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