UPO: Ultra Pure Oxygen

Designed for the electronics industry

The UPO unit is engineered to seamlessly fit into your Carrier Gas Yard architecture and meet the stringent constraints of modern semiconductor fabs.

• Dual operating modes: The unit can be smoothly integrated with our high-purity nitrogen generators (TCN™ BE and AO series) or operate as a completely stand-alone system using third-party liquid oxygen as a feedstock.
• Tailored capacities: The system offers three standard flow rate options, continuously generating from 120 to 600 Nm³/h of ultra-pure liquid oxygen.
• High pressure output: Gases are delivered at a pressure greater than 9.5 barG to precisely match the requirements of your manufacturing processes.

The requirement for extreme purity

The fabrication of electronic devices tolerates zero impurities. Our UPO technology relies on a state-of-the-art cryogenic distillation process, guaranteeing an oxygen concentration greater than 99.5% while strictly eliminating critical contaminants.

When coupled with our downstream purification solutions, the purity of the delivered gases reaches exceptional levels with impurities measured well below the parts-per-billion (ppb) threshold, ensuring the absolute stability of your cleanrooms.